No. | Item | ²ÎÊý |
| 1 | Dimensions | L5800mm*W2600mm*H2600mm |
| 2 | C/T | 11S |
| 3 | 3D camera positioning accuracy | ¡À0.1mm |
| 4 | USC cleaning efficiency | 98% removal rate of 3um dust particles 98% removal rate of 6um dust particles |
| 5 | Yield | 99% |
| 6 | Power supply requirements | 220V£¬ 50Hz£¬22kw |
| 7 | Air source requirements | ¡Ý0.5MPa |